Capacitance Manometer×日本エム・ケー・エス - メーカー・企業と製品の一覧

Capacitance Manometerの製品一覧

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Baratron 600 Series

Achieve process reproducibility with excellent long-term stability! Capacitance manometer.

The "Baratron 600 Series" is a RoHS-compliant absolute capacitance manometer designed to provide accurate and highly reproducible pressure and vacuum measurements even in harsh process environments. It is utilized as the most stable low-pressure measurement pressure transducer. 【Features】 ■ Achieves a minimum of 2.66 Pa F.S. ■ Directly measures total pressure regardless of gas composition ■ Measures up to 1×10^-4 F.S. with percentage accuracy ■ A variety of lineups from temperature-controlled types up to 200°C to those with setpoint relays ■ Corrosion-resistant structure made entirely of Inconel or Incoloy nickel alloy *For more details, please refer to the PDF document or feel free to contact us.

企業：日本エム・ケー・エス
価格：Other

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High-Temperature Digital Capacitance Manometer 'DA03A'

Reduce zero point shift due to high-temperature operation, for CVD, Etch, and ALD!

The "DA03A" is a RoHS-compliant digital high-temperature type Baratron® capacitance manometer. By operating at high temperatures, it minimizes the accumulation of process by-products inside the sensor. This nearly eliminates output drift caused by by-product accumulation. It can be used at operating temperatures of 150°C or 160°C, making it suitable for the most demanding and harsh vacuum processes in semiconductor manufacturing, such as metal etching and insulating film CVD. 【Features】 ■ Operates at high temperatures of 150°C and 160°C ■ All Inconel capacitance sensor ■ Space-saving compact design ■ Stable performance regardless of gas type ■ EU RoHS compliant *For more details, please refer to the PDF document or feel free to contact us.